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Keynote Sessions

IDETC/CIE

VIB KEYNOTE – MYKLESTAD AWARD Biography: Dr. I. Y. (Steve) Shen is a Professor of Mechanical Engineering
LECTURE Department of the University of Washington. He received his BS and MS
degrees from National Taiwan University, and his PhD degree from the
Tuesday, August 8 University of California, Berkeley, all in Mechanical Engineering.
11:00am–12:00pm
Professor Shen’s general research area is vibration, dynamics, sensing,
Room 26 A and actuation. In particular, his expertise includes PZT thin-film micro-
sensors/actuators, insect dynamics, medical devices, and spindle and rotor
I. Y. (Steve) Shen dynamics. In the areas of PZT thin films, he is developing micro-sensors
and actuators for various future applications, such as structural health
University of Washington Seattle monitoring sensors and hybrid cochlear implants. In the area of insect
dynamics, he is studying vibration of flapping wings and pulsating thorax in
“Development of Lead-Zirconate-Titanate (Pzt) Thin-Film Microactuators order to develop sensors and actuators for motion control and guidance of
dor Inner Ear Hearing Rehabilitation” flapping-wing micro-aerial vehicles. In the area of medical devices, he is
developing microphones and microactuators to enable intra-cochlear
Abstract: Hearing loss is a common disability in aging seniors and people hearing aids. He is also developing clinical tools to nondestructively
who work long hours in noisy environments. For patients who are nearly evaluate dental implant stability. In the area of spindle and rotor dynamics,
deaf, surgeons often place an electrode array in cochlea, known as a he is developing computational algorithms to predict vibration of complex
cochlear implant, to stimulate auditory nerves. Recent medical research rotating machines, such as hard disk drives and cyclic symmetric rotors.
indicates that combination of a cochlear implant (electric-based) and a
traditional hearing aid (acoustic-based) has proved to enhance speech Professor Shen is a Fellow of American Society of Mechanical Engineers
recognition significantly. A grand challenge is to develop an intra-cochlear (ASME). He is currently the Technical Editor of ASME Journal of Vibration
acoustic microactuator to realize the combined stimulations. A successful and Acoustics.
development requires fusion of knowledge from various fields, including
vibrations, acoustics, material science, micro-fabrication, smart materials,
mechatronics, cochlear mechanics, and audiology.

In this presentation, I will discuss design, fabrication, and testing of a
piezoelectric-based intra-cochlear microactuator. The microactuator
employs a lead-zirconate-titanate (PZT) thin film to transversely vibrate a
diaphragm of size “0.8 mm × 0.8 mm × 2 μm” to generate pressure waves
in cochlea. Major challenges affecting its vibration performance include
electric circuit layout, electrode size, residual stresses, piezoelectric
coefficients measurements, and fabrication processes. Testing in an
aqueous environment shows that surrounding liquid presents significant
added mass. Experimental measurements also indicate that the acoustic
microactuator may experience a snap-through phenomenon. Finally, an
acute animal test confirms that the intra-cochlear microactuator does
produce pressure waves audible to the animal.

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